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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

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A. Adami

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Review Open access Sep 2026

Silicon Carbide Thin Films for MEMS: Correlating Vapor-Phase Deposition Parameters with Material Properties and Device Performance

Silicon carbide (SiC) thin films have emerged as a key material platform for micro-electromechanical systems (MEMS) designed to operate under extreme thermal, chemical, and mechanical conditions. While significant research has focused on individual SiC deposition techniques and material characteristics, comprehensive a...

Neeraj Yadav, Басит Хамид Абдул, A. Adami et al. · 0 citations

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