Open access
Oct 2026
Trajectory-dependent electronic stopping in simulations of self-ion ranges in elemental semiconductors
Characterizing how materials respond to energetic-particle irradiation is fundamental to a wide range of semiconductor processes. However, the deceleration of energetic particles in solids remains an active area of research due to the complex nature of energy exchange between ionic and electronic systems. Recently, t...
Rafael Nuñez-Palacio, Glen P. Kiely, Artur Tamm et al.
· npj Computational Materials · 1 citation