Open access
Oct 2026
High-precision machining of silicon surface with intense femtosecond extreme ultraviolet pulses
Femtosecond laser direct writing (LDW), which uses ultraviolet, visible or infrared lasers, is a maskless subtractive manufacturing approach that is widely used for precision surface processing. This is because of the strong spatial confinement of laser energy and minimal collateral damage. Here, we present a concept...
V. Lipp, Gota Yamaguchi, S. Egawa et al.
· Scientific Reports · 0 citations