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Conference Aug 2026

Factor Graph-Optimized Cross-Scale Detector for Wafer Defect Detection

Accurate wafer defect detection is critical for yield improvement in semiconductor manufacturing and package testing. Conventional CNN-based and Transformer-based detectors struggle to localize small defects and capture global context in low-resolution images with extreme scale variation. In this paper, we propose FGC-...

Rui Chen, Bing Long, Zhi-Jian Dai et al. · 0 citations

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