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Sponsored AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI

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C. Cheung

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Oct 2026

Precise fabrication of 3D microstructures via optimized diffuser grayscale lithography

Grayscale lithography enables the fabrication of three-dimensional microstructures in photoresist, which can subsequently be transferred into substrate materials by dry etching. Among the available techniques, diffuser-based grayscale lithography offers a cost-effective and mask-efficient route to continuous-profile mi...

M. Christophersen, C. Fasano, C. Cheung · 0 citations

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