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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

Author

Chen Li

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Sep 2026

Synergistic design of an SU-8-based CMUT array for low-frequency ultrasonic detection under liquid loading

Capacitive micromachined ultrasonic transducers (CMUTs) operating under liquid loading conditions suffer from significant added-mass effects and radiation damping, which degrade low-frequency vibration response and acoustic output performance. To address this issue, a synergistically optimized SU-8-based CMUT structure...

Chen Li, Xiao-Meng Zhang, Jie Li · 0 citations

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