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Author

Cheng-Jun Song

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2026

Low Cross Sensitivity Fiber-Optic MEMS Pressure Sensor for Water Depth Measurement

To address the demand for high-precision depth detection in intelligent monitoring and sensing applications for the ocean environment, this letter presents a fiber-optic Fabry-Perot (FP) micro-electro-mechanical systems (MEMS) water depth pressure sensor. Its core is a miniaturized FP cavity fabricated via anodic bondi...

Jiping Liu, Meng Zhang, Cheng-Jun Song et al. · 0 citations

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