Robust Unsupervised Acoustic Anomaly Detection for Turbo Molecular Pumps Using ResNet–Convolutional Block Attention Module and Structural Similarity Loss
An unsupervised acoustic anomaly detection and localization system to address real-time predictive maintenance in noisy industrial settings and achieves an outstanding AUC of 0.9535 and a fault recall of 99.06% under a validation-calibrated threshold, significantly outperforming standard U-Net architectures.