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Chuan Zhang

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Review Oct 2026

AI-Driven Super-Resolution Enhancement of Scanning Electron Microscopy Images for Semiconductor Failure Analysis

Scanning electron microscopy (SEM) is central to semiconductor failure analysis (FA), but high-resolution acquisition is slow, and fast survey scans often lack the detail needed to decide where to look closely. We report two results on enhancing low-detail SEM images of static random-access memory (SRAM) arrays. Firs...

Alexey Solovey, J. Elliott, Chuan Zhang et al. · 0 citations

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