Redefining a Scalable β-Ga2O3/SiC Heterogeneous Material Platform via MOCVD-Assisted Ion-Cutting Technology.
Heterointegration has emerged as a key developmental pathway for the continuous progress of microelectronics technology in the post-Moore era. However, there exists an urgent demand for practical and universally applicable approaches to realize high-quality heterogeneous integrated materials. In this study, MOCVD-assis...