Open access
Sep 2026
Numerical simulation of breakdown characteristics of capacitively coupled hollow-cathode discharge
Hollow-cathode discharge (HCD) is widely applied in processes like chemical vapor deposition because its trench structures can enhance ionization and plasma density and promote sputtering. While discharge characteristics have been studied extensively, existing studies on the breakdown phase have predominantly focused o...
Yu Wang, Zhao-Yun Chen, Zi-Li Chen et al.
· Journal of Applied Physics · 0 citations