Oct 2026
Development of a differential deposition system based on wavefront metrology for ellipsoidal mirrors
Ellipsoidal X-ray mirrors are ideal focusing optics, offering a high numerical aperture (NA), a long working distance, and high beam utilization efficiency. However, the figure accuracy of mirrors fabricated via the electroforming process is limited to approximately 100nm PV due to internal stress relaxation upon relea...
Y. Ebiike, H. Motoyama, S. Egawa et al.
· Advances in X-Ray/EUV Source... · 0 citations