VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography
System combines a Virtual Process Engineer (VPE) harness with a Skill Bank of measured engineering experience that equips a frozen language model with process manuals, layout analysis, recipe editing, and commercial-tool evaluation and reduces the mean per-case maximum edge placement error on a FreePDK45-derived benchm...
Tian-Yi Li, Wen-Xuan Dong, Dong-Er Luo et al.
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