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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

Author

Jian-Hua Hao

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Sep 2026

MEMS calorimetric gas flow sensor based on vanadium dioxide

Traditional platinum-based thermal Micro-Electro-Mechanical Systems (MEMS) gas flow sensors exhibit low sensitivity and poor performance in high-precision microflow detection. To address this bottleneck, this work utilizes tungstendoped vanadium dioxide (W-VO2), which exhibits a metal-insulator phase transition near ro...

Dai Zhang, He Ma, Guan-Yi Li et al. · 0 citations

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