On‐Chip Microheater‐Based Back‐End‐of‐Line Compatible Synthesis of VO2 Films for Reconfigurable Silicon Photonics
We report a back‐end‐of‐line (BEOL)‐compatible approach for integrating high‐quality vanadium dioxide (VO2) into silicon photonic platforms using on‐chip doped silicon microheaters as localized thermal processors. VO2 is a promising material for reconfigurable photonics due to its large refractive index modulation and...