Conference
Sep 2026
Research on noise suppression in phase unwrapping for Ronchi shearing interferometry
Lithography lies at the heart of integrated circuit manufacturing, and its projection lens is a key part that directly determines the device’s resolution through imaging quality. This imaging quality is typically characterized by wavefront aberration, and high-precision measurement of wavefront aberrations is an essent...
Yong-Sheng Hui, Jian-Ke Li, Ji Zhou et al.
· Global Intelligent Industry... · 0 citations