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Author

L. Stepanov

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Jul 2026

Electrical discharge radiation source for the wavelength region below 10 nm

The results of the experiments with potentially “clean” electrical discharge source of extreme ultraviolet (EUV) radiation with wavelength below 10 nm are presented. The operation of the source is based upon the use of the early stage of vacuum discharge with external triggering. The main feature of the stage under con...

P. Antsiferov, L. Stepanov · 0 citations

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