Open access
Sep 2026
Graphene Field-Effect Transistor Process and Analysis Optimization in 200 mm Pilot-Line Environment
The maturity of the chemical vapor deposition graphene-based device processing has increased from chip-level demonstrations to wafer-scale fabrication in the past few years. Due to this, wafer-scale electrical characterization and analysis of the fabricated devices have become increasingly important to enable extractio...
A. Murros, M. Soikkeli, Anni Virta et al.
· ACS Nano · 1 citation