A Comparative Study of Machine Learning Algorithms for Measuring Thin-Film Thickness Using Terahertz Time-Domain Waves Simulated by the Finite Difference Time Domain Method
Terahertz (THz) waves offer unique advantages, including non-contact operation, high penetration capability, and high resolution, making them particularly well-suited for the non-destructive thickness measurement of film-structured materials. In reflective terahertz time-domain spectroscopy (THz-TDS), thickness measure...