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Author

P. D. de Groot

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Open access Sep 2026

Enhanced lateral resolution in interference microscopy with surface slope and part tilt

Lateral resolution is a key performance characteristic in microscopy, defining the ability to distinguish closely spaced features and setting fundamental limits on quantitative imaging and surface metrology. Here we show that surface slope and part tilt in interference microscopy enable detection of spatial-frequency c...

P. D. de Groot, X. C. de Lega, P. Takacs et al. · 0 citations

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