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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

Author

Paola Favia

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Oct 2026

Enabling Efficient Strain Analysis of Advanced Nodes with STEM Nanobeam Diffraction Enhanced by Beam Precession at Sub-2nm Spatial Resolution

The dimensions of transistors become smaller while their architecture becomes more complex in 3D due to the demand for faster data processing, faster signal transmission, and decreasing power consumption. Consequently, requirements on the accuracy and quality of TEM lamellae and the established and conventional analy...

Daniel Němeček, B. Clarke, Nithin Iyappan et al. · 0 citations

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