Open access
Aug 2026
Focal spot morphology reconstruction and dimensional quantification of microfocus x-ray sources using combined edges rotation method
Micro-computed tomography (micro-CT) is a fundamental technology for detecting micro-defects and characterizing three-dimensional internal structures. It is widely used in advanced semiconductor packaging, new material research, and micro-nano manufacturing. The size and two-dimensional morphology of x-ray focal spots...
Guo-Wei Zhong, Cheng-Feng Liu, Feng-Xiao Li et al.
· Measurement science and tech... · 0 citations