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Sponsored Artificial Intelligence: A Modern Approach, Global Edition Artificial Intelligence: A Modern Approach, Global Edition

Author

Quanke Pan

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2026

Transient Scheduling of Dual-Armed Cluster Tools With Concurrent Processing: An MIP Model and a Fast Heuristic

Efficient transient scheduling of cluster tools is critical to stable fab-level operations in high-mix, low-volume semiconductor manufacturing. This study investigates the transient scheduling problem of dual-armed cluster tools (DACTs) processing two wafer types concurrently. From an engineering-management perspective...

Zhen-Yan Wu, Fa-Jun Yang, Chao Li et al. · 0 citations

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