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Author

S. Egawa

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Open access Oct 2026

High-precision machining of silicon surface with intense femtosecond extreme ultraviolet pulses

Femtosecond laser direct writing (LDW), which uses ultraviolet, visible or infrared lasers, is a maskless subtractive manufacturing approach that is widely used for precision surface processing. This is because of the strong spatial confinement of laser energy and minimal collateral damage. Here, we present a concept...

V. Lipp, Gota Yamaguchi, S. Egawa et al. · 0 citations
Oct 2026

Development of a differential deposition system based on wavefront metrology for ellipsoidal mirrors

Ellipsoidal X-ray mirrors are ideal focusing optics, offering a high numerical aperture (NA), a long working distance, and high beam utilization efficiency. However, the figure accuracy of mirrors fabricated via the electroforming process is limited to approximately 100nm PV due to internal stress relaxation upon relea...

Y. Ebiike, H. Motoyama, S. Egawa et al. · 0 citations

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