Seok-Hyeon Ha

Electron energy distribution measurement in an inductively coupled plasma with a cryogenic temperature substrate

The impact of substrate cooling on electron energy probability function is investigated in an inductively coupled plasma. For Ar plasma, the electron density triples at 60 mTorr as the substrate temperature decreases. The dependence is observed over a wide temperature range from 200 K (cryogenic) to 330 K (above room t...