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Author

Shriram Ramanathan

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Open access Sep 2026

On‐Chip Microheater‐Based Back‐End‐of‐Line Compatible Synthesis of VO2 Films for Reconfigurable Silicon Photonics

We report a back‐end‐of‐line (BEOL)‐compatible approach for integrating high‐quality vanadium dioxide (VO2) into silicon photonic platforms using on‐chip doped silicon microheaters as localized thermal processors. VO2 is a promising material for reconfigurable photonics due to its large refractive index modulation and...

K. Dao, Siddharth Kumar, Zhi-Yun Xu et al. · 0 citations

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