Sven Weller

AD8302 phase detector for plasma power measurements of the RF-driven COST reference plasma jet

An easy-to-implement technique for measuring the dissipated plasma power of RF-excited plasmas at a frequency of 13.56 MHz is presented in this work. Specifically, the AD8302 phase detection board is used to measure the phase difference between voltage and current signals of the COST reference plasma jet. The system wa...