Low-Thermal-Budget High-Mobility In2O3 Thin-Film Transistors Enabled by an In Situ Multifunctional Protection Layer
While atomic layer deposition (ALD)-grown In2O3 thin-film transistors (TFTs) hold great promise for next-generation electronics, the performance and reliability of highly desirable top-gate configurations are often limited by interfacial degradation caused by photolithography chemicals and plasma exposure during devi...