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Tribeni Roy

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Open access Sep 2026

Microwave-induced hydrogen plasma in a quartz bell-jar type MPCVD process: a multi-physics simulation approach

Plasma-based simulation enables precise control of plasma dynamics and temperature fields, essential for optimizing reactor design and achieving uniform, high-quality film growth. In this work, a multi-physics modelling approach was used to study the effect of microwaves on hydrogen plasma generation in a quartz bell-j...

Sachin Shishodia, Tribeni Roy, S. Pande et al. · 0 citations

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