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Sponsored AI Networking Cookbook: Practical recipes for AI-assisted network automation and development AI Networking Cookbook: Practical recipes for AI-assisted network automation and development

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Xin-Hua Chen

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Conference Sep 2026

High-precision wavefront measurement for high numerical aperture microscope objectives based on sub-aperture stitching

High numerical aperture (NA) microscope objectives are critical in semiconductor wafer defect inspection. Conventional wavefront measurement approaches are limited by the precision of reference wavefronts and inherent systematic errors, which restricts their performance in high-precision metrology. To address these iss...

William Yang Wang, Xin-Hua Chen · 0 citations

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