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Author

Xinyi Fan

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Aug 2026

Physics-informed deep learning for predicting optical properties of Nb–Ta anodic oxide films from spectroscopic ellipsometry

The prediction of optical properties for anodic oxide films from spectroscopic ellipsometry data constitutes a typical inverse problem. Traditional iterative fitting methods suffer from high computational cost and strong dependence on the model structure. This study develops a physics-informed deep learning framework t...

Xinyi Fan, Xiao-Cha He, A. I. Mardare et al. · 0 citations

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