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Sponsored AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI AI AM CLAUDE, A Beginner's Guide: Learn the basics of working with AI

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Y. Granik

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Oct 2026

Inverse lithography via polar representation for curvilinear mask synthesis

BackgroundInverse lithography technology (ILT) revolutionized computational lithography by offering significant advantages over traditional optical proximity correction through its capacity for complex mask shapes and robust gradient-based optimization.AimWe aim to propose and analyze the impact of a polar mask represe...

Y. Granik · 0 citations

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