Yue-Peng Song

Evolution of Structural, Optical, and Electrical Properties of Amorphous Silicon Thin Films Deposited by Radio Frequency Magnetron Sputtering

Amorphous silicon thin films have attracted considerable attention for photovoltaic applications owing to their low material consumption and compatibility with low‐temperature fabrication processes. In this work, amorphous silicon films were deposited on indium tin oxide substrates by radio‐frequency magnetron sputteri...