Site-selective control of electron-induced Fe(CO)5 dissociation by hydration: a mechanistic pathway to high-purity nanofabrication.
Through first-principles simulations, this study elucidates the mechanism by which water molecules steer the electron-induced dissociation of iron pentacarbonyl (Fe(CO)5), a key process in focused electron beam-induced deposition (FEBID). We demonstrate that the adsorption site of a single water molecule is a critical...