Planar 3-DOF Pose Measurement for Macromotion Stages via 1-D Phase-Guided Image Correlation
Real-time and high-precision measurement with multi-degree-of-freedom (multi-DOF) sensing capability is critical for ensuring the positioning performance of macromotion stages. This article proposes a planar 3-DOF pose measurement method based on 1-D image correlation. By employing a dual-axis digital image grating (DI...