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Zi-Heng Liu

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Aug 2026

Plasma etching profile evolution prediction based on edge-extended long short-term memory network

An edge-extended Long Short-Term Memory network (exLSTM) is proposed for etching profile evolution prediction, combining the exponential gating of scalar LSTM for long-term dependencies and the matrix memory of matrix LSTM for complex spatial modeling.

Zi-Heng Liu, Ze-Xuan Liu, Jun-Yi An et al. · Journal of Vacuum Science &a... · 0 citations