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Review Open access Sep 2026

Silicon Carbide Thin Films for MEMS: Correlating Vapor-Phase Deposition Parameters with Material Properties and Device Performance

Silicon carbide (SiC) thin films have emerged as a key material platform for micro-electromechanical systems (MEMS) designed to operate under extreme thermal, chemical, and mechanical conditions. While significant research has focused on individual SiC deposition techniques and material characteristics, comprehensive a...

Neeraj Yadav, Басит Хамид Абдул, A. Adami et al. · 0 citations
Aug 2026

Optical and electrical properties of RF-sputtered AZO thin films for space optical applications

Transparent conductive oxides (TCOs) are of considerable interest for optical and optoelectronic applications requiring both high optical transparency and electrical conductivity. Among these materials, aluminum-doped zinc oxide (AZO) has emerged as a promising alternative to indium tin oxide (ITO) because of its low c...

Jessica B. Patel, Nurunnesa Sultana, L. R. Rodriguez de Marcos et al. · 0 citations
Aug 2026

Evolution of Structural, Optical, and Electrical Properties of Amorphous Silicon Thin Films Deposited by Radio Frequency Magnetron Sputtering

Amorphous silicon thin films have attracted considerable attention for photovoltaic applications owing to their low material consumption and compatibility with low‐temperature fabrication processes. In this work, amorphous silicon films were deposited on indium tin oxide substrates by radio‐frequency magnetron sputteri...

Wei-Qiang Li, Peng-Fei Ji, Yong Li et al. · 0 citations
Open access Sep 2026

Non-destructive silicon quantification in low-level Si-doped diamond-like carbon films

Diamond-like carbon (DLC) films offer exceptional mechanical and chemical properties but face limitations in adhesion and thermal stability, which restrict their broader applications. Current characterization methods for silicon-doped DLC films rely on destructive techniques, which pose challenges for industrial qualit...

P. Poolcharuansin, Nanthapat Chanapai · 0 citations
Open access Sep 2026

Impact of Rapid Thermal Annealing on the Structural and Piezoelectric Properties of AlN Thin Films

Aluminum nitride (AlN) is a biocompatible piezoelectric material with energy harvesting properties. This study examines the effects of post‐deposition rapid thermal annealing (RTA) on AlN thin films used in microelectromechanical systems (MEMS) resonators. RTA is performed in a N 2 ‐purged chamber at temperatures...

Laura Mazón-Maldonado, Lucía Nieto Sierra, M. P. V. Castro et al. · 0 citations
Open access 2026

Enhanced thermal conductivity of SiC-coated diamond/Al composites for heat dissipation interfaces in power modules

ABSTRACT The continued development of high-power semiconductor devices, particularly those based on wide-bandgap materials such as silicon carbide (SiC) and gallium nitride (GaN), has created a growing demand for thermal management materials with high conductivity and compatible thermal expansion. This research focuses...

Zong-Chen Liu, Feng Liu · 0 citations

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