Surface acoustic wave (SAW) sensors, owing to their high operating frequencies, compatibility with planar micro-fabrication, and exceptional sensitivity to surface perturbations, are widely used in lab -on-a-chip and biomedical diagnostic applications. However, conventional SAW sensors operating in liquid environments suffer from substantial energy dissipation, which markedly reduces their quality factors (Q factors) and limits sensing reliability. Here, we design and fabricate a topological SAW resonant sensor for surface liquid loading by exploiting interference coupling between topological interface states and resonant cavities. The band structures are validated using a semi-analytical plane wave expansion-finite element method. The device requires only 0.04 uL of sample and enables concentration sensing of NaCl and glucose solutions, with sensitivities of up to 190 kHz/% for NaCl and 101.8 kHz% for glucose, respectively, and a concentration resolution of 0.01%. This work offers a potential technological route towards high-performance SAW biomedical chips for micro-volume sample analysis.
Micro- and nanomechanical resonators are widely used for chemical and biological detection. Mode localization sensing, based on the distribution of energy between two or more coupled resonators, has demonstrated enhanced sensitivity with respect to the conventional frequency shift method. In contrast, this work introdu...
Qiu-Xuan Wang, Xiaoxi Zhao, M. K. Ghatkesar et al.· Journal of Micromechanics an...· 0 citations
Surface acoustic wave-based resonators are sensitive probes of condensed matter systems, as well as surface-selective sensors for chemistry and biology. Surface acoustic wave devices have also been integrated into hybrid quantum systems with qubit platforms for applications in quantum information processing and sensing...
P. Rath, J. M. Kitzman, M. Mesbah et al.· 0 citations
Surface acoustic wave (SAW) micromanipulation enables the precise, non-contact handling of microscale particles and has attracted considerable interest in microfluidics and biomedicine. However, conventional SAW platforms generally rely on simple interference fields which are susceptible to fabrication imperfections an...
Jiaqi Zhang, Decai Wu, Ting Ma et al.· 0 citations
Understanding how the mechanical properties of liquids confined within nanometer-scale gaps differ from bulk behavior is central to biophysics, lubrication, catalysis, electrochemistry, and surface science. Yet the characterization of ultrathin confined liquids remains challenging, as many existing approaches rely on d...
Capacitive micromachined ultrasonic transducers (CMUTs) operating under liquid loading conditions suffer from significant added-mass effects and radiation damping, which degrade low-frequency vibration response and acoustic output performance. To address this issue, a synergistically optimized SU-8-based CMUT structure...
Chen Li, Xiao-Meng Zhang, Jie Li· AI Photonics Technology Symp...· 0 citations
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