Dynamic Modeling Method of Silicon-Based MEMS Gyroscopes for Special Environments

Abstract

Micro-electromechanical gyroscopes serve as the core components of inertial navigation systems and are frequently subjected to complex and harsh operational conditions, including abrupt temperature variations, transportation-induced vibrations, and transient overloads during applications, which significantly constrain the navigation and guidance accuracy of these systems. To tackle the challenges of limited mechanical modeling precision and the absence of a well-established theoretical framework for structural optimization and circuit design in conventional ring vibrating gyroscopes, this paper introduces a novel dynamic modeling approach for capacitive ring vibrating gyroscopes. By integrating the mechanical characteristics of elastic beam materials with the fundamental principles governing structural mechanical vibrations, we systematically deduce the mechanical response relationships and establish a dynamic theoretical model. To validate the model's efficacy, finite element modal simulation analysis is performed, revealing that the natural frequency of the gyroscope's fundamental operational mode is 6.036 kHz, thereby substantiating the rationality and accuracy of the proposed model. This study enhances the theoretical framework for dynamic analysis of ring vibrating gyroscopes and offers crucial support for the engineering development and practical deployment of high-performance, highly disturbance-resistant MEMS ring vibrating gyroscopes.