Improving Corrosion Protection for Biomedical SS316L Using SiN Thin Films Applied by RF Sputtering, Tested in Strong Oxidative Environment, Depending on RF Power

Abstract

Biomedical-grade stainless steel (316L) is susceptible to corrosion in human body fluids, and the subsequent release of metallic ions may contribute to adverse health effects. Silicon nitride (SiN), a biocompatible material, offers strong adhesion and serves as an effective barrier on metallic substrates, significantly reducing the corrosion rate of 316L stainless steel. The corrosion resistance of the SiN coating is influenced by the sputtering deposition parameters. In this study, SiN thin films were deposited at varying power levels to optimize the corrosion resistance of 316L stainless steel. Surface and electrochemical characterization techniques were employed. The findings demonstrate that the thin film deposited at 60 W exhibits the highest corrosion resistance, attributed to its reduced apparent porosity (1.3%).