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Author

Chao Li

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Conference Aug 2026

Transient Scheduling of Dual-Armed Cluster Tools with Concurrent Processing for Enhancing Fab-Level Resilience

With the rapid evolution of global semiconductor supply chains, maintaining efficient and stable fab-level operations is critical to manufacturing performance. As core processing platforms in advanced wafer fabrication, cluster tools face increasing scheduling complexity under high-mix, lowvolume production. This study...

Zhen-Yan Wu, Chao Li, Fa-Jun Yang · 0 citations
2026

Transient Scheduling of Dual-Armed Cluster Tools With Concurrent Processing: An MIP Model and a Fast Heuristic

Efficient transient scheduling of cluster tools is critical to stable fab-level operations in high-mix, low-volume semiconductor manufacturing. This study investigates the transient scheduling problem of dual-armed cluster tools (DACTs) processing two wafer types concurrently. From an engineering-management perspective...

Zhen-Yan Wu, Fa-Jun Yang, Chao Li et al. · 0 citations

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