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Open access Oct 2026

A Modified YOLOv11 Model for Wafer Defect Detection Using Attentive Feature Interaction and Shape-Aware Loss

The results demonstrate the effectiveness of the proposed framework for high-throughput wafer-defect inspection on desktop-class hardware, and its low parameter count makes it a promising candidate for future deployment on resource-constrained edge devices.

Fan Jiang, Hua-Ching Chen, Song-Lin Wei et al. · 0 citations

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