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Author

M. Tümer

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Conference Aug 2026

MEMS on Fiber Sensor for Temperature and Pressure Sensing

We present a compact MEMS-on-fiber multisensor capable of simultaneous pressure and temperature sensing for surgical assistance. The device integrates a micromachined Fabry-Perot membrane for pressure detection and exploits the temperature-dependent bandgap shift of GaAs for thermal sensing. Both modalities are probed...

Morteza Teymoori, Parviz Zolfaghari, O. Ferhanoğlu et al. · 0 citations

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