MEMS on Fiber Sensor for Temperature and Pressure Sensing

Abstract

We present a compact MEMS-on-fiber multisensor capable of simultaneous pressure and temperature sensing for surgical assistance. The device integrates a micromachined Fabry-Perot membrane for pressure detection and exploits the temperature-dependent bandgap shift of GaAs for thermal sensing. Both modalities are probed through a multimode GRIN fiber, enabling simple alignment and robustness against bending. Experimental results demonstrate a pressure sensitivity of 9.04 nm/mmHg and a temperature sensitivity of 1.38%/°C. The compact, point-wise sensing capability and intrinsic decoupling of pressure and temperature make the platform promising for minimally invasive and MRI-compatible clinical applications.