MEMS Fiber-Tip Photoacoustic Spectrometer for In Situ Microscale Trace Gas Sensing
To meet the stringent requirements for miniaturized and highly sensitive trace gas sensing in space-constrained scenarios, including power equipment monitoring, minimally invasive biomedical diagnostics, and in situ lithium-battery analysis, we report a MEMS-integrated fiber-tip photoacoustic spectrometer (MFPAS). The...