MEMS Fiber-Tip Photoacoustic Spectrometer for In Situ Microscale Trace Gas Sensing

Abstract

To meet the stringent requirements for miniaturized and highly sensitive trace gas sensing in space-constrained scenarios, including power equipment monitoring, minimally invasive biomedical diagnostics, and in situ lithium-battery analysis, we report a MEMS-integrated fiber-tip photoacoustic spectrometer (MFPAS). The device incorporates a Fabry-Perot (F-P) photoacoustic sensor formed by directly butt-coupling a single-mode fiber (SMF) to a 3 mm x 3 mm MEMS chip with a 100-nm-thick low-pressure chemical vapor deposition (LPCVD) Si$_3$N$_4$ diaphragm. The resulting approximately 200-$\mu$m deep silicon microcavity functions simultaneously as a photoacoustic gas cell and an acoustic confinement cavity. A micro-aperture fabricated at the diaphragm periphery by focused ion beam (FIB) milling serves as both a gas diffusion channel and an acoustic high-pass filter, suppressing ambient low-frequency pressure fluctuations and stabilizing the F-P quadrature point without active servo control. In gas-phase measurements, the sensor achieves a noise-equivalent concentration (NEC) of 58.5 ppb@1s, with a rapid response time of 6 s. Benefiting from its ultra-small cavity volume of approximately 1.5 nL, the device is further adapted through structural packaging for in situ dissolved gas analysis in transformer oil, where it achieves an NEC of 230 ppb@1s and a T90 response time of 320 s in the oil phase. By combining nanoliter-scale detection volume, ppb-level sensitivity, rapid response, and wafer-scale batch fabrication compatibility, the proposed MFPAS bridges MEMS diaphragm micromachining and FIB-enabled gas exchange engineering. This design overcomes the intrinsic gas-exchange limitation of conventional sealed-diaphragm optical microphones and offers significant potential for power equipment monitoring and in situ health diagnostics.