Author

S. Rochester

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Open access Sep 2026

Enhanced lateral resolution in interference microscopy with surface slope and part tilt

Lateral resolution is a key performance characteristic in microscopy, defining the ability to distinguish closely spaced features and setting fundamental limits on quantitative imaging and surface metrology. Here we show that surface slope and part tilt in interference microscopy enable detection of spatial-frequency c...

P. D. de Groot, X. C. de Lega, P. Takacs et al. · Journal of Physics: Photonic... · 0 citations

Oct 2026

Geometrical distortion effect in Fizeau interferometry measurements of large-radius tangentially curved optics. Part 1: development, characterization, and first application of bendable URA BPRA test sample

Plane wavefront Fizeau interferometry (PWFI) is one of the major metrology techniques for surface characterization of xray optics in the low and middle spatial frequency range. However, PWFI measurements of curved optics are often associated with significant systematic effects arising from complex phenomena, including...

V. Yashchuk, K. Munechika, H. Barnard et al. · Advances in X-Ray/EUV Source... · 0 citations

Oct 2026

Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry

High‑accuracy metrology is essential for fabricating and optimizing free‑form X‑ray mirrors, where nanometer‑scale precision demands reliable calibration of instrument performance. Binary pseudo‑random array (BPRA) “white‑noise” artifacts enable direct determination of an instrument’s transfer function (ITF). To extend...

K. Munechika, U. Griesmann, C. Pina-Hernandez et al. · Advances in X-Ray/EUV Source... · 0 citations