Open access
Oct 2026
A Modified YOLOv11 Model for Wafer Defect Detection Using Attentive Feature Interaction and Shape-Aware Loss
The results demonstrate the effectiveness of the proposed framework for high-throughput wafer-defect inspection on desktop-class hardware, and its low parameter count makes it a promising candidate for future deployment on resource-constrained edge devices.
Fan Jiang, Hua-Ching Chen, Song-Lin Wei et al.
· Engineer · 0 citations