Multiple patterning lithography (MPL) has been widely used to improve lithography resolution in advanced nodes, but it faces cost limits as feature sizes shrink. Directed self-assembly (DSA) offers a cost-effective complement, extending the resolution of optical lithography to sub-10 nm and beyond. Integrating DSA into MPL (DSA-MP) further enhances the resolution of contact/via patterning. Nevertheless, growing design complexity exposes the limits of existing decomposition methods, which struggle to balance solution quality and runtime, and neglect edge-to-edge spacing constraints of DSA templates, compromising manufacturability. To address these issues, we introduce a new conflict graph model capturing the previously overlooked constraints and develop a local refinement strategy powered by the graph neural network, enabling efficient and scalable layout decomposition. Experiments demonstrate that our method achieves higher solution quality with faster convergence than state-of-the-art methods, while maintaining robustness across layout scales, design styles, technology nodes, and varying mask counts.
This paper investigates developing real-world perception for active agents, proposes Gibson Environment for this purpose, and showcases a set of perceptual tasks learned therein.
F. Xia, Amir Zamir, Zhi-Yang He et al.· 2018 IEEE/CVF Conference on...· 1,069 citations· ⚡112
GAOKAO-Bench is introduced, an intuitive benchmark that employs questions from the Chinese GAOKAO examination as test samples, including both subjective and objective questions that contribute a robust evaluation benchmark for future large language models and offers valuable insights into the advantages and limitations...
Xiaotian Zhang, Chun-yan Li, Yi Zong et al.· arXiv.org· 216 citations· ⚡17
An algorithm is proposed which leverages disentangled semantic factors to generate adversarial perturbation by altering controlled semantic attributes to fool the learner towards various "adversarial" targets.
Haonan Qiu, Chaowei Xiao, Lei Yang et al.· arXiv.org· 208 citations· ⚡17
This work proposes a HALO that directly maximizes the utility of generations instead of maximizing the log-likelihood of preferences, and suggests that the best loss depends on the inductive biases most appropriate for a given setting, an oft-overlooked consideration.
This work investigates the possibilities of using LLMs in a resume screening setting via a document retrieval framework that simulates job candidate selection and finds that the MTEs are biased, significantly favoring White-associated names in 85% of cases and female-associated names in only 11.1% of cases.
This work shows that orders of magnitude enhancement in performance could be obtained by a combination of hardware improvements and tight quantum-HPC integration and introduces high-performance architectures for quantum-probabilistic computing with custom-designed accelerators to tackle today's industry-scale classical...
Masoud Mohseni, Artur Scherer, K. Johnson et al.· arXiv.org· 121 citations· ⚡9
